Publication:

SIGEM, low temperature deposition of poly-SiGe MEMs structures on standard CMOS circuits

Date

2005

Proceedings Paper

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Author(s)

Ramos-Martos, Juan

;

Ceballos-Caceres, Joaquin

;

Ragel-Morales, Antonio

;

Mora=-Gutierrez, Jose Miguel

;

Arias-Drake, Alberto

;

Lagos-Florido, Miguel-ANgel

;

Munoz-Hinojosa, Jose Maria

;

;

;

;

;

Leinenbach, Christina

;

Van Aerde, Steven

;

;

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1982 since deposited on 2021-10-16

Acq. date: 2026-02-24