Browsing by Author "Lenk, St."
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Publication Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)
Proceedings paper2005-05, 4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4, 23/05/2005, p.36-37Publication Strain relaxation of pseudomorphic Si1-xGe/Si(100) heterostructures after Si+ ion implantation
;Holländer, B. ;Buca, D. ;Mörschbächer, M. ;Lenk, St. ;Mantl, S. ;Herzog, H.J. ;Hackbarth, Th.Journal article2004, Journal of Applied Physics, (96) 3, p.1745-1747Publication Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing
;Mantl, S. ;Holländer, B. ;Hüging, N. ;Luysberg, M. ;Lenk, St. ;Hogg, S.M. ;Herzog, H.-J.Hackbarth, T.Oral presentation2003, 12th EURO-CVD Workshop