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Browsing by Author "Lenk, St."

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    Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)

    Mantl, S
    ;
    Buca, D.
    ;
    Feste, S.
    ;
    Hollander, B.
    ;
    Lenk, St.
    ;
    Loo, Roger  
    ;
    Caymax, Matty  
    ;
    Carius, R.
    Proceedings paper
    2005-05, 4th International Conference on Silicon Epitaxy and Heterostructures - ICSI-4, 23/05/2005, p.36-37
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    Strain relaxation of pseudomorphic Si1-xGe/Si(100) heterostructures after Si+ ion implantation

    Holländer, B.
    ;
    Buca, D.
    ;
    Mörschbächer, M.
    ;
    Lenk, St.
    ;
    Mantl, S.
    ;
    Herzog, H.J.
    ;
    Hackbarth, Th.
    ;
    Loo, Roger  
    Journal article
    2004, Journal of Applied Physics, (96) 3, p.1745-1747
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    Strain relaxation of SiGe buffers on Si and SOI wafers induced by He+ ion implantation and thermal annealing

    Mantl, S.
    ;
    Holländer, B.
    ;
    Hüging, N.
    ;
    Luysberg, M.
    ;
    Lenk, St.
    ;
    Hogg, S.M.
    ;
    Herzog, H.-J.
    ;
    Hackbarth, T.
    Oral presentation
    2003, 12th EURO-CVD Workshop

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