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Browsing by Author "Leroy, Florian"

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    Mitigation of plasma-induced damage in porous low-k dielectrics by cryogenic precursor condensation

    Zhang, Liping  
    ;
    de Marneffe, Jean-Francois  
    ;
    Leroy, Florian
    ;
    Lefaucheux, Philippe
    Journal article
    2016, Journal of Physics D: Applied Physics, (49) 17, p.17

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