Browsing by Author "Leroy, Floriane"

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Cryoetching processes applied to ULK material

Leroy, Floriane
;
Tillocher, Thomas
;
Lefaucheux, Philippe
;
Dussart, Remi
;
yatsuda, koichi
Meeting abstract
2015, 37th International Symposium on Dry Process - DPS, 5/11/2015
Low damage cryoetching of low-K materials

Dussart, Remi
;
Tillocher, Thomas
;
Leroy, Floriane
;
Lefaucheux, Philippe
;
yatsuda, koichi
Meeting abstract
2015, SPIE Advanced Lithograply, 22/02/2015, p.162 (9428-20)
Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics

de Marneffe, Jean-Francois
;
Zhang, Liping
;
Watanabe, Mitsuhiro
;
yatsuda, koichi
;
Maekawa, Kaoru
Oral presentation
2016, SPIE Advanced Lithography Conference