Publication:

Low damage cryoetching of low-K materials

Date

2015

Meeting abstract

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Author(s)

;

Tillocher, Thomas

;

Leroy, Floriane

;

Lefaucheux, Philippe

;

yatsuda, koichi

;

;

Nishimura, Eiichi

;

;

de Marneffe, Jean-Francois

;

Baklanov, Mikhaïl

Statistics

1914 since deposited on 2021-10-22

Acq. date: 2026-01-25