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Browsing by Author "Letertre, Fabrice"

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    Germanium deep-submicron pFET and nFET devices with etched TaN metal gate and high-k dielectric, fabricated on germanium-on-insulator substrates

    Meuris, Marc  
    ;
    De Jaeger, Brice  
    ;
    Van Steenbergen, Jan  
    ;
    Letertre, Fabrice
    ;
    Raskin, Geoffroy
    Oral presentation
    2005, MRS Spring Meeting Symposium G: Advanced Gate Dielectric Stacks on High-Mobility Semiconductors

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