Browsing by Author "Leunissen, Leonardus"
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Publication An improved CMP process for integration of high mobility channel materials
Meeting abstract2016, International Conference on Planarization Technology - ICPT, 17/10/2016Publication An improved CMP process for integration of high mobility channel materials
; ; ; ; Publication Improving defectivity for III-V CMP processes for < 10 NM technology nodes
Proceedings paper2014, International Conference on Planarization/CMP Technology - ICPT, 19/11/2014, p.15-17Publication Inspection, characterization and classification of defects for improved CMP of III-V materials
Journal article2015, ECS Journal of Solid State Science and Technology, (4) 11, p.5073-5077Publication Inspection, characterization and classification of defects for improved CMP of III-V materials
Proceedings paper2015, 34th CMP Users Meeting, 29/10/2015Publication Updates on Ge AND SiGe CMP processes for integration as high mobility channel materials
Meeting abstract2015, International Conference on Planarization/CMP Technology - ICPT, 30/09/2015