Publication:
Updates on Ge AND SiGe CMP processes for integration as high mobility channel materials
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1951 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Metrics
Views
1951 since deposited on 2021-10-22
450item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations