Browsing by Author "Li, M.-F."

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Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2

Wang, X.P.
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Yang, J.J.
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Chen, J.D.
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Xie, R.L.
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Li, M.-F.
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Zhu, C.X.
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Yu, HongYu
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Du, A.Y.
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Lim, P.C.
Proceedings paper
2007, International Conference on Solid State Devices and Materials - SSDM, 18/09/2007, p.854-855
Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

Wang, Xin Peng
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Yu, HongYu
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Yeo, Y.-C.
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Li, M.-F.
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Chang, Shou-Zen
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Cho, Hag-Ju
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Kubicek, Stefan
Proceedings paper
2008, Symposium on VLSI Technology. Digest of Technical Papers, 17/06/2008, p.162-163