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Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2
Publication:
Practical solutions to enhance EWF tunability of Ni FUSI gate electrode on HfO2
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Date
2007
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, X.P.
;
Yang, J.J.
;
Chen, J.D.
;
Xie, R.L.
;
Li, M.-F.
;
Zhu, C.X.
;
Yu, HongYu
;
Du, A.Y.
;
Lim, P.C.
;
Lim, Andy
;
Mi, Y.Y.
;
Lai, Doreen M.Y.
;
Loh, W.Y.
;
Biesemans, Serge
;
Lo, G.Q.
;
Kwong, D.-L.
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1933
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Acq. date: 2026-01-07
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Views
1933
since deposited on 2021-10-16
3
last month
2
last week
Acq. date: 2026-01-07
Citations