Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Li, W.M."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Enhancement of ALCVD(TM) TiN growth on Si-O-C and a-SiC:H films by O2-based plasma treatments

    Satta, Alessandra
    ;
    Baklanov, Mikhaïl
    ;
    Richard, Olivier  
    ;
    Vantomme, Andre  
    ;
    Bender, Hugo  
    Journal article
    2002, Microelectronic Engineering, (60) 1_2, p.59-69

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings