Browsing by Author "Li, Xiaohai"
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Publication Double patterning OPC and design for 22nm to 16nm device nodes
;Lucas, Kevin ;Cork, Chris ;Miloslavsky, Alex ;Luk-Pat, Gerry ;Li, Xiaohai ;Barnes, LeviGao, WeiminProceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009