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Browsing by Author "Li, Xiaohai"

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    Double patterning OPC and design for 22nm to 16nm device nodes

    Lucas, Kevin
    ;
    Cork, Chris
    ;
    Miloslavsky, Alex
    ;
    Luk-Pat, Gerry
    ;
    Li, Xiaohai
    ;
    Barnes, Levi
    ;
    Gao, Weimin
    Proceedings paper
    2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009

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