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Browsing by Author "Li, Xuefa"

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    The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation

    Green, Martin L.
    ;
    Li, Xuefa
    ;
    Wang, Jin
    ;
    Allen, Andrew J.
    ;
    Delabie, Annelies  
    ;
    Puurunen, Riikka
    Proceedings paper
    2004, Atomic Layer Deposition Conference, 16/08/2004

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