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Browsing by Author "Li, YiSuo"

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    Publication

    FEOL patterning challenges in scaled SRAM with vertical Surrounding Gate Transistors (SGT)

    Tao, Zheng  
    ;
    Li, Waikin  
    ;
    Kim, Min-Soo  
    ;
    Devriendt, Katia  
    ;
    Lorant, Christophe  
    ;
    Sebaai, Farid  
    Meeting abstract
    2019, DPS2019 (41st International symposium on Dry Process), 21/11/2019

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