Publication:

FEOL patterning challenges in scaled SRAM with vertical Surrounding Gate Transistors (SGT)

Date

2019
Meeting abstract
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Author(s)

Tao, Zheng  
;
Li, Waikin  
;
Kim, Min-Soo  
;
Devriendt, Katia  
;
Lorant, Christophe  
;
Sebaai, Farid  
;
Porret, Clément  
;
Rosseel, Erik  
;
Sepulveda Marquez, Alfonso  
;
Jourdan, Nicolas  
;
Kikuchi, Yoshiaki  
;
Boemmels, Juergen  
;
Mitard, Jerome  
;
Matagne, Philippe  
;
Ragnarsson, Lars-Ake  
;
Dangol, Anish  
;
Batuk, Dmitry  
;
Martinez Alanis, Gerardo Tadeo  
;
Geypen, Jef  
;
Altamirano Sanchez, Efrain  
;
Lee, James
;
Li, YiSuo
;
Kanazawa, Kenichi
;
Harada, Nozomu
;
Masuoka, Fujio

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2051 since deposited on 2021-10-27
Acq. date: 2026-01-25

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2051 since deposited on 2021-10-27
Acq. date: 2026-01-25

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