Browsing by Author "Li, Yingying"
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Publication Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process
;Li, Yingying ;Worsey, Elliott ;Bleiker, Simon J. ;Edinger, PierreKulsreshath, Mukesh KumarJournal article2023, NANOSCALE, (15) 43, p.17335-17341