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Browsing by Author "Lin, Jian"

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    Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns

    Singh, Arjun  
    ;
    Chan, BT  
    ;
    Parnell, Doni
    ;
    Wu, Hengpeng
    ;
    Lin, Jian
    ;
    Cao, Yi
    ;
    Gronheid, Roel  
    Proceedings paper
    2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250X

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