Publication:
Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns
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1969 since deposited on 2021-10-22
Acq. date: 2025-10-23
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1969 since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations