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Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns

Date

2015
Proceedings Paper
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dc.contributor.authorSingh, Arjun
dc.contributor.authorChan, BT
dc.contributor.authorParnell, Doni
dc.contributor.authorWu, Hengpeng
dc.contributor.authorLin, Jian
dc.contributor.authorCao, Yi
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.date.accessioned2021-10-22T22:57:31Z
dc.date.available2021-10-22T22:57:31Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25917
dc.identifier.urlhttp://spie.org/Publications/Proceedings/Paper/10.1117/12.2086352
dc.source.beginpage94250X
dc.source.conferenceAdvances in Patterning Materials and Processes XXXII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.title

Patterning sub-25nm half-pitch hexagonal arrays of contact holes with chemo-epitaxial DSA guided by ArFi pre-patterns

dc.typeProceedings paper
dspace.entity.typePublication
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