Browsing by Author "Litovchenko, V. G."

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Carbon enhancement of SiO2 nucleation in buried oxide synthesis

Efremov, A. A.
;
Litovchenko, V. G.
;
Romanova, G. P.
;
Sarikov, A. V.
;
Claeys, C.
Journal article
2001, Journal of the Electrochemical Society, (148) 5, p.F92-F97
gamma-Irradiation hardness of short-channel NMOSFETS fabricated in a 0.5 μm SOI technology

Claeys, Cor
;
Simoen, Eddy
;
Efremov, A.
;
Litovchenko, V. G.
;
Evtukh, A.
;
Kizjak, A.
;
Rassamakin, J.
Journal article
2002, Nuclear Instruments & Methods in Physics Research B, (186) 1_4, p.429-434
Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling

Romanyuk, B. N.
;
Litovchenko, V. G.
;
Efremov, A. A.
;
Mel'nik, V. P.
;
Claeys, C.
Oral presentation
1998, NATO Advanced Research Workshop on "Perspectives, Sciences and Technologies of Novel Silicon-on-Insulator Devices"; 12-15 Octobe
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation

Litovchenko, V. G.
;
Efremov, A. A.
;
Romanyuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
Journal article
1998, J. Electrochem. Soc., (145) 8, p.2964-2969
Stimulated buried dielectric phase formation for nanelectronic aims

Litovchenko, V. G.
;
Romanyuk, B. N.
;
Efremov, A. A.
;
Mel'nik, V. P.
;
Claeys, Cor
Proceedings paper
1997, Proceedings of the 8th International Symposium on Silicon-on-Insulator Technology and Devices, 31/08/1997, p.81-85
Use of gettering and defect induced processes in ultra-thin buried oxide synthesis

Litovchenko, V. G.
;
Efremov, A. A.
;
Romanuk, B. N.
;
Mel'nik, V. P.
;
Claeys, Cor
Proceedings paper
1997, Proceedings of the 7th Conference on Gettering and Defect Engineering in the Semiconductor Technology - GADEST '97, 5/10/1997, p.97-102
γ-irradiation hardness of short channel NMOSFETs fabricated in a 0.5 µm SOI technology

Claeys, C.
;
Simoen, Eddy
;
Efremov, A.
;
Litovchenko, V. G.
;
Evtuth, A.
;
Kizjak, A.
;
Rassamakin, J.
Oral presentation
2001, Symposium B of the E-MRS Spring Meeting 2001: Defect Engineering of Advanced Semiconductor Devices;