Browsing by Author "Lo, Patrick"
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Publication High performance & CMOS integration friendly dual metal gate MOSFETs using TaN/Ru or TaN/W/Ru stacking multi-layers on HfLaO gate dielectric
;Wang, X.P. ;Li, M.F. ;Yu, HongYu ;Yang, J.J. ;Loh, W.Y. ;Zhu, C.X. ;Du, A.Y. ;Trigg, A.D.Zhang, G.Proceedings paper2007, International Conference on Solid State Devices and Materials - SSDM, 18/09/2006