Publication:

High performance & CMOS integration friendly dual metal gate MOSFETs using TaN/Ru or TaN/W/Ru stacking multi-layers on HfLaO gate dielectric

Date

2007

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

;

;

;

;

;

Biesemans, Serge

;

;

;

;

Statistics

1929 since deposited on 2021-10-16

2last month

Acq. date: 2026-01-25