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Browsing by Author "Loboda, M."

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    Process optimization and integration of trimethylsilane deposited a-SiC:H and SiOC:H dielectric thin films for damascene processing

    Gray, William
    ;
    Loboda, M.
    ;
    Struyf, Herbert  
    ;
    Van Hove, Marleen
    ;
    Donaton, R. A.
    ;
    Sleeckx, Erik  
    Oral presentation
    2000, MRS Spring Meeting 2000. Symposium D: Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics; 2

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