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Browsing by Author "Loboda, M.J."

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    Process optimization and integration of trimethylsilane-deposited a-SiC:H and a-SiCO:H dielectric thin films for damascene processing

    Gray, W.D.
    ;
    Loboda, M.J.
    ;
    Bremmer, J.N.
    ;
    Struyf, Herbert  
    ;
    Lepage, Muriel
    ;
    Van Hove, Marleen
    Journal article
    2003, Journal of the Electrochemical Society, (150) 7, p.G404-G411

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