Publication:
Process optimization and integration of trimethylsilane-deposited a-SiC:H and a-SiCO:H dielectric thin films for damascene processing
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1947 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1947 since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations