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Browsing by Author "Locke, K."

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    Publication

    New drying techology for advanced cleaning in IC manufacturing

    Meuris, Marc  
    ;
    Mertens, Paul  
    ;
    Schmidt, Harald
    ;
    Hurd, Trace
    ;
    Li, Li
    ;
    Heyns, Marc  
    ;
    Jonckx, Franky
    Proceedings paper
    1994, Vacuum and Semiconductor Processing Conference, 15/06/1994

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