Browsing by Author "Lohr, Leonhard"
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Publication Precise optical constants: determination and impact on metrology, simulation and development of EUV masks
;Saadeh, Qais ;Mesilhy, Hazem ;Soltwisch, Victor ;Erdmann, AndreasCiesielski, RichardProceedings paper2022, Photomask Technology Conference, SEP 26-29, 2022, p.Art. 122930Y