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Browsing by Author "Lohr, Leonhard"

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    Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

    Saadeh, Qais
    ;
    Mesilhy, Hazem
    ;
    Soltwisch, Victor
    ;
    Erdmann, Andreas
    ;
    Ciesielski, Richard
    Proceedings paper
    2022, Photomask Technology Conference, SEP 26-29, 2022, p.Art. 122930Y

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