Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

Saadeh, Qais; Mesilhy, Hazem; Soltwisch, Victor; Erdmann, Andreas; Ciesielski, Richard; Lohr, Leonhard; Andrle, Anna; Philipsen, Vicky; Thakare, Devesh; Laubis, Christian; Scholze, Frank; Kolbe, Michael

doi:10.1117/12.2643246

Publication:

Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

Date

2022

Proceedings Paper

https://doi.org/10.1117/12.2643246

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

;

;

;

Journal

Proceedings of SPIE

Statistics

1259 since deposited on 2023-02-15

1last month

1last week

Acq. date: 2026-04-06

Precise optical constants: determination and impact on metrology, simulation and development of EUV masks

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations