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Browsing by Author "Lopaev, Dmitry"

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    Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures

    Rakhimova, Tatyana
    ;
    Braginsky, OLEG
    ;
    Klopovskiy, Konstantin
    ;
    Kovalev, Alexander
    Journal article
    2009, IEEE Transactions on Plasma Science, (37) 9, p.1683-1696

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