Browsing by Author "Lopaev, Dmitry"
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Publication Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures
;Rakhimova, Tatyana ;Braginsky, OLEG ;Klopovskiy, KonstantinKovalev, AlexanderJournal article2009, IEEE Transactions on Plasma Science, (37) 9, p.1683-1696