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Browsing by Author "Lopez Villanueva1, Francisco Javier"

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    Selectivity tuning by Peroxide concentration for the selective etching of SiGe20 to Si and SiGe40 to SiGe20

    Lopez Villanueva1, Francisco Javier
    ;
    Altamirano Sanchez, Efrain  
    Proceedings paper
    2023-04-19, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 11-13 Sept 2023, p.29-33

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