Selectivity tuning by Peroxide concentration for the selective etching of SiGe20 to Si and SiGe40 to SiGe20

Publication:

2023-04-19

Proceedings Paper

Author(s)

;

Solid State Phenomena; Vol. 346

396 since deposited on 2023-09-17

3last month

Acq. date: 2026-01-09