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Browsing by Author "Loquet, J.P."

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    Electrical and physical characterization of MOSFETs with MBE grown La2HfO7 and HfO2 high-k dielectrics integrated in a conventional flow

    Conard, Thierry  
    ;
    Pantisano, Luigi
    ;
    Claes, Martine  
    ;
    Demand, Marc  
    ;
    Deweerd, Wim
    ;
    De Gendt, Stefan  
    Oral presentation
    2005, Workshop "Nouveaux Oxides à Forte Permittivité dans l'Intégration des Semiconducteurs"

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