Browsing by Author "Loreti, S."
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Publication Analysis of the structural properties of polycrystalline silicon germanium films
Proceedings paper1999, ICM'99. The eleventh international conference on microelectronics. Proceedings;, p.67-70Publication Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
Journal article1998, Journal of Microelectromechanical Systems, (7) 4, p.365-372