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Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
Publication:
Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
Date
1998
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sedky, Sherif
;
Fiorini, Paolo
;
Caymax, Matty
;
Loreti, S.
;
Baert, Kris
;
Hermans, Lou
;
Mertens, Robert
Journal
Journal of Microelectromechanical Systems
Abstract
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1885
since deposited on 2021-10-01
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Acq. date: 2025-10-25
Citations
Metrics
Views
1885
since deposited on 2021-10-01
407
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations