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Browsing by Author "Loriaux, Genevieve"

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    Open-circuit potential analysis as a fast screening method for the quality of high-k dielectric layers

    Claes, Martine  
    ;
    Witters, Thomas  
    ;
    Loriaux, Genevieve
    ;
    Van Elshocht, Sven  
    ;
    Delabie, Annelies  
    Proceedings paper
    2003, Ultra Clean Processing of Silicon Surfaces 2002 - UCPSS, 16/09/2002, p.7-11

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