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Open-circuit potential analysis as a fast screening method for the quality of high-k dielectric layers
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Open-circuit potential analysis as a fast screening method for the quality of high-k dielectric layers
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Date
2003
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claes, Martine
;
Witters, Thomas
;
Loriaux, Genevieve
;
Van Elshocht, Sven
;
Delabie, Annelies
;
De Gendt, Stefan
;
Heyns, Marc
;
Okorn-Schmidt, H.
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1805
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1805
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations