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Browsing by Author "Lorusso, Gian F."

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    Publication

    Chemically amplified resist CDSEM metrology exploration for high NA EUV lithography

    Severi, Joren  
    ;
    Lorusso, Gian F.
    ;
    De Simone, Danilo  
    ;
    Moussa, Alain  
    ;
    Saib, Mohamed  
    ;
    Duflou, Rutger  
    Journal article
    2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 2, p.02107

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