Browsing by Author "Loucif Seiad, Mohamed"
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Publication Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
Meeting abstract2014, 58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN, 27/05/2014Publication PMMA removal in diblock copolymer P(S-b-MMA) self-assembly process
Meeting abstract2014, Plasma Etch and Strip Processes for Micro and Nano- Technologies - PESM, 12/06/2014