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Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
Publication:
Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loucif Seiad, Mohamed
;
Singh, Arjun
;
MKuppuswamy, Vijaya Kumar
;
Ferhat, Marhoun
;
Gronheid, Roel
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1900
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Acq. date: 2025-12-11
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Views
1900
since deposited on 2021-10-22
1
last month
Acq. date: 2025-12-11
Citations