Publication:

Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers

Date

2014
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorLoucif Seiad, Mohamed
dc.contributor.authorSingh, Arjun
dc.contributor.authorMKuppuswamy, Vijaya Kumar
dc.contributor.authorFerhat, Marhoun
dc.contributor.authorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorGronheid, Roel
dc.date.accessioned2021-10-22T03:16:46Z
dc.date.available2021-10-22T03:16:46Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24170
dc.source.beginpagena
dc.source.conference58th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication - EIPBN
dc.source.conferencedate27/05/2014
dc.source.conferencelocationWashington DC USA
dc.title

Effect of processing parameters on self-assembly of cylindrical phase PS-b-PMMA BCPs on 300 mm Si wafers

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions