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Browsing by Author "Lucas, Kevin D."

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    Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode

    Montgomery, Patrick K.
    ;
    Lucas, Kevin D.
    ;
    Litt, Lloyd C.
    ;
    Conley, Will
    ;
    Fanucchi, Eric
    Proceedings paper
    2003-12, 23rd Annual BACUS Symposium on Photomask Technology, 8/09/2003, p.814-825

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