Browsing by Author "Lucas, Kevin D."
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Publication Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode
;Montgomery, Patrick K. ;Lucas, Kevin D. ;Litt, Lloyd C. ;Conley, WillFanucchi, EricProceedings paper2003-12, 23rd Annual BACUS Symposium on Photomask Technology, 8/09/2003, p.814-825