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Browsing by Author "Ludwig, K.F."

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    In situ synchrotron based x-ray fluorescence and scattering measurements during atomic layer deposition : Initial growth of HfO2 on Si and Ge substrates

    Devloo-Casier, K.
    ;
    Dendooven, J.
    ;
    Ludwig, K.F.
    ;
    Lekens, Geert  
    ;
    D'Haen, Jan  
    ;
    Detavernier, C.
    Journal article
    2011, Applied Physics Letters, (98) 23, p.231905

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