Browsing by Author "Lukaszewicz, Mikolaj"
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Publication An experimental study of VUV plasma damage on porous organo-silicon glass materials
Meeting abstract2013-02, SPIE Advanced Lithography Conference: Advanced Etch Technology for Nanopatterning II, 24/02/2013Publication Effect of 147 nm radiation on a 2.0 porous organo-Silicon glass
Meeting abstract2013, Materials for Advanced Metallization - MAM, 11/03/2013, p.119-120Publication Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches
Meeting abstract2014, AVS 61st International Symposium and Exhibition, 9/11/2014, p.PS-MoM4Publication Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3)
Meeting abstract2012, Gaseous Electronics Conference, 22/10/2012