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An experimental study of VUV plasma damage on porous organo-silicon glass materials
Publication:
An experimental study of VUV plasma damage on porous organo-silicon glass materials
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Date
2013-02
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
de Marneffe, Jean-Francois
;
Lukaszewicz, Mikolaj
;
Heyne, Markus
;
Zhang, Liping
;
Baklanov, Mikhaïl
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2001
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
2001
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-10
Citations