Browsing by Author "Luzinov, Igor"
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Publication Composite polymer core – ceria shell abrasive particles during silicon oxide CMP
Proceedings paper2007, Advances and Challenges in Chemical Mechanical Planarization, 8/04/2007, p.C8.4Publication Interaction forces between a glass surface and ceria-modified PMMA-based abrasives for CMP measured by colloidal probe AFM
Journal article2008, Journal of the Electrochemical Society, (155) 4, p.H218-H223Publication Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
Journal article2007, Electrochemical and Solid-State Letters, (10) 2, p.H74-H78Publication Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP
Proceedings paper2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.169-172