Publication:
Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
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1920 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-11
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Views
1920 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-11
Citations