Browsing by Author "Möller, W."
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Publication Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study
Proceedings paper2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and Related Topics - SIMS XIV, 14/09/2003, p.603-608Publication Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Journal article2005-02, Applied Physics A, (81) 1, p.71-77