Publication:
Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
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1844 since deposited on 2021-10-16
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Acq. date: 2026-09-17
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Statistics
Views
1844 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-09-17
Citations