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Browsing by Author "Mörschbächer, M.J."

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    The use of ion implantation and annealing for the fabrication of strained silicon on thin SiGe virtual substrates

    Buca, D.
    ;
    Mörschbächer, M.J.
    ;
    Holländer, B.
    ;
    Luysberg, M.
    ;
    Loo, Roger  
    ;
    Caymax, Matty  
    ;
    Mantl, S.
    Proceedings paper
    2004, High-Mobility Group-IV Materials and Devices, 12/04/2004, p.15-26

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