Browsing by Author "Mac Geary, M. J."
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Publication Chemicals for the Chlorination of Gate Oxides
Proceedings paper1994, Vacuum and Semiconductor Processing Conference, 15/06/1994Publication Effect of different chlorine sources during gate oxidation
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.143-146